LNEYA Refrigeratore raffreddato ad aria o refrigeratore raffreddato ad acqua
LTS -40℃～35℃
Temperature control during semiconductor manufacturing- Controllo del flusso12L/min~45L/min
- Precisione della temperatura±0.1℃ @40℃~-10℃
- Internal circulating liquid4L~10L
- Serbatoio di espansione10L~20L
- Luogo di origineCina
Download dei dati del prodotto
Parametri dettagliati
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Modello
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LTS-402
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LTS-403
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LTS-404
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LTS-406
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LTS-408
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LTS-402W
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LTS-403W
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LTS-404W
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LTS-406W
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LTS-408W
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Intervallo di temperatura
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-40℃～35℃
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Precisione del controllo della temperatura
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±0.1℃ -40℃～-10℃
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Controllo del flusso
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7～25L/min
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12～45L/min
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The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
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Internal circulating fluid volume
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4L
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5L
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6L
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8L
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10L
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Volume del vaso di espansione
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10L
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10L
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15L
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15L
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20L
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Visualizzazione della pressione del sistema
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The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
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The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
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Controllore
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PLC, algoritmo di controllo PID fuzzy, con algoritmo di controllo a cascata
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Temperature control
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Modalità di controllo della temperatura di uscita del fluido di trasferimento del calore
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External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
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Lettera di accordo
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Interfaccia Ethernet Protocollo TCP/IP
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Interfaccia RS485 protocollo modbus RTU
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Internal temperature feedback of equipment
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Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
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Sistema di circolazione chiuso
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The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
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Compressore
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Emerson Copeland/Danfoss Scroll Flexible Compressor
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Pompa di circolazione
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Magnetic circulation pump
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Evaporatore
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Scambiatore di calore a piastre
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Condensatore
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Micro channel condenser (air-cooled)
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Plate heat exchanger (water-cooled), special attention: clean factory water is required
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Accessori per la refrigerazione
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Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
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Pannello operativo
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Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
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Sicurezza
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With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
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Dimensioni dell'interfaccia di ingresso e di uscita
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ZG1/2
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ZG1/2
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ZG3/4
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ZG3/4
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ZG3/4
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Descrizione del prodotto
It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.
1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Ottimizzare il campionamento della temperatura e la velocità di risposta, algoritmo di controllo appositamente progettato, in grado di rispondere rapidamente al controllo della temperatura stabile.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.
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