LTS -20℃~80℃ Fluoride cooling and heating system

Temperature control during semiconductor manufacturing

Controllo del flusso12L/min~45L/min
Internal circulating liquid4L~10L
Serbatoio di espansione10L~20L
Luogo di origineCina

sistema di controllo dinamico della temperatura Controllo della temperatura del liquido fluorurato Serie LTS refrigeratore di prova per semiconduttori

RICHIESTA

Download dei dati del prodotto

manuale.pdf

Parametri dettagliati

Modello	LTS-202	LTS-203	LTS-204	LTS-206	LTS-208
	LTS-202W	LTS-203W	LTS-204W	LTS-206W	LTS-208W
Intervallo di temperatura	-20℃～35℃
Precisione del controllo della temperatura	±0.1℃ at -20℃～0℃
Controllo del flusso	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
Volume del vaso di espansione	10L	10L	15L	15L	20L
Visualizzazione della pressione del sistema	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
Controllore	PLC, algoritmo di controllo PID fuzzy, con algoritmo di controllo a cascata
Temperature control	Modalità di controllo della temperatura di uscita del fluido di trasferimento del calore
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Lettera di accordo	Interfaccia Ethernet Protocollo TCP/IP
	Interfaccia RS485 protocollo modbus RTU
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Sistema di circolazione chiuso	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
Compressore	Emerson Copeland/Danfoss Scroll Flexible Compressor
Pompa di circolazione	Magnetic circulation pump
Evaporatore	Scambiatore di calore a piastre
Condensatore	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
Accessori per la refrigerazione	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Pannello operativo	Schermo tattile a colori da 7 pollici personalizzato LNEYA, visualizzazione della curva di temperatura
Sicurezza	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
Dimensioni dell'interfaccia di ingresso e di uscita	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4

Descrizione del prodotto

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Ottimizzare il campionamento della temperatura e la velocità di risposta, algoritmo di controllo appositamente progettato, in grado di rispondere rapidamente al controllo della temperatura stabile.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

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