Refrigeratori industriali LNEYA Fornitore -
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refrigeratori a semiconduttore
Compact，High-accuracy, Environment-friendly
Temp range -100℃~90℃ Temp accuracy ±0.05℃
LNEYA Semiconductor Chillers characteristics
LNEYA represents the internationally advanced liquid temperature control technology, actively explores and studies the temperature test simulation of the component test system, has a wide temperature direction and high temperature rise and fall, temperature range: -100°C~+90°C, temperature control accuracy up to: ±0.05℃.
Products include fluid fluorine liquid temperature control (minimum -100 degrees) and support multi-channel continuous temperature control. All equipment undergoes 100% ammonia testing and 100% safety testing before leaving the factory to ensure system safety and reliability.
high-precision Process chillers
Integrates refrigeration heating and temperature control functions. It is mainly used for temperature control in semiconductor FAB processes and packaging and testing processes.
Saving more than 20% energy compared to the old products; it adopts a fully enclosed pipeline design to reduce the demand for heat transfer medium, and at the same time, the heat discharged by the compressor is used for heating within 40℃, so the circulation heating can be achieved without a heater.
FLTZ 5℃~90℃
process chillers
Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃
FLTZ -25℃～90℃
thermal chillers
Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃
FLTZ -45℃～90℃
low temperature chillers
Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃
FLTZ -80℃～+90℃
recirculating water chiller
Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃
FLTZ -100℃～+90℃
recirculation chiller
Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃
Semiconductor Chiller‘s Applications
Semiconductor manufacturing is a process with extremely high environmental requirements, and strict temperature control determines the performance of the product. Semiconductor chillers are commonly used in semiconductor industry packaging and testing processes, semiconductor FAB process temperature control, cooling of CMOS/CCD sensors in semiconductor metrology systems, circulating cooling of semiconductor metrology AOI systems, providing independent temperature control for cavity side walls, plasma bevel etching and deposition, thermal atomic layer etching of metal tungsten, etc.
For Aging test equipment
The matching thermal drying system provides cooling and heating temperature, improves the test efficiency and quality of wafer chips, and has small temperature accuracy error.
For Chip testing Equipment
The thermal chiller is matched with the test machine, with a temperature control accuracy of ±0.05℃, which improves the chip testing efficiency of the institute.
For Semiconductor fab
The process chiller is used in semiconductor fabs, with high-precision cooling and heating temperature control, which improves the manufacturing rate of wafers and reduces the scrap rate.
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.
Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.
Why Choose LNEYA ?
The semiconductor industry has very strict requirements on temperature control accuracy. Many process steps are extremely sensitive to temperature changes. The performance and quality of the products rely on high-precision semiconductor chillers. LNEYA provides professional thermal management solutions for the semiconductor industry.
LNEYA is a leading semiconductor chiller manufacturer in China, focusing on precise temperature control. Since 2010, LNEYA has proven to be a reliable chiller supplier in many semiconductor applications. We have many standard products of semiconductor chillers. If you have a special application, we can tailor it to your requirements in terms of size, operating interface, number of channels, heat load, etc.
Intervallo di temperatura molto ampio, senza necessità di sostituire il mezzo liquido;
Risultati efficienti in termini di stabilità e ripetibilità della produzione;
Tecnologia di raffreddamento ad alta temperatura, avvia direttamente il compressore per raffreddarsi a 300 ℃.
Sistema completamente chiuso, che prolunga la durata dei liquidi termoconduttivi;
Utilizzo di scambiatori di calore a piastre e riscaldatori in tubazione per migliorare i tassi di raffreddamento e riscaldamento;
Contact LNEYA chiller sales
Representative to obtain a standard product catalog and sample book for semiconductor chillers, or customize your chiller.
Add our account manager via the QR code below
WeChat/Phone
86 18914253067
86 13912479193
Indirizzo e-mail
sales@cnzlj.com
